3 results
Nanoscale Pattern Transfer Using Sputter-Induced Corrugations Formed at the Si/SiO2 Interface
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- Journal:
- MRS Online Proceedings Library Archive / Volume 705 / 2001
- Published online by Cambridge University Press:
- 15 March 2011, Y4.8
- Print publication:
- 2001
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- Article
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Atomic Diffusion and Strain Measurement on Si Grating Structures by X-Ray Diffraction
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- Journal:
- MRS Online Proceedings Library Archive / Volume 380 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 61
- Print publication:
- 1995
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Strain Measurement in Two-Dimensional Nanoscale Si Gratings by High Resolution X-Ray Diffraction
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- Journal:
- MRS Online Proceedings Library Archive / Volume 405 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 109
- Print publication:
- 1995
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